Inventors:
Daniel W. Thompson - Lincoln NE
Blaine D. Johs - Lincoln NE
Assignee:
Board of Regents of University of Nebraska - Lincoln NE
J.A. Woollam Co. Inc. - Lincoln NE
International Classification:
G01N 2121, G01J 3447
Abstract:
A sample system investigation system, such as an ellipsometer or polarimeter system, for use in investigating sample systems with electromagnetic wavelengths in the infrared range, and a calibration method for compensating nonidealities in multi-dimensional system rotated and non-rotated component representing matricies, are disclosed. An essentially achromatic compensator of dual-rhomb construction, which introduces a (3*LAMBDA/4) phase shift, but essentially no deviation in the direction of propagation of a polarized beam of electromagnetic wavelengths caused to pass therethrough, even when said compensator is caused to continuously rotate, is also disclosed.