DANIEL BROWN, MS, BCC, CPC
Medical Practice at Laurel Ave, Los Angeles, CA

7939778, May 10, 2011

Jan 22, 2009

12/357989

Dean J. Larson - Pleasanton CA, US
Daniel Brown - Brentwood CA, US
Saurabh J. Ullal - Union City CA, US

Lam Research Corporation - Fremont CA

B23K 10/00

21912143, 21912141, 15634534, 15634547, 118723 I

A plasma processing chamber, which includes an upper electrode assembly, a lower electrode assembly, and a plasma confinement assembly. The upper electrode assembly includes an upper electrode, a backing member, the backing member attachable to an upper surface of the upper electrode, and a guard ring surrounding an outer surface of the backing member and located above the upper surface of the upper electrode, wherein the guard ring is configured to provide an inner gap between the outer surface of the backing member and an inner periphery of the guard ring. The lower electrode assembly is adapted to receive a semiconductor substrate. The plasma confinement assembly is separated from an outer periphery of the upper electrode and the backing member by the guard ring.

2013029, Nov 14, 2013

May 9, 2012

13/467652

Darrell Ehrlich - San Jose CA, US
Daniel Arthur Brown - Brentwood CA, US
Ian Kenworthy - Campbell CA, US

Lam Research Corporation - Fremont CA

B05B 7/16, H01L 21/3065, H05K 13/00

239128, 295921, 438710, 257E21218

A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.

2011005, Mar 10, 2011

Sep 10, 2010

12/879351

Daniel Arthur Brown - Brentwood CA, US
Jeff A. Bogart - Campbell CA, US
Ian J. Kenworthy - Campbell CA, US

Lam Research Corporation - Fremont CA

H01L 21/306

15634533

An upper chamber section of a plasma reaction chamber includes a ceramic window with blind bores in an upper surface for receipt of a thermal couple and a resistance temperature detector, a top chamber interface which comprises an upper surface which vacuum seals against the bottom of the window and a gas injection system comprising 8 side injectors mounted in the sidewall of the top chamber interface and a gas delivery system comprising tubing which provides symmetric gas flow to the 8 injectors from a single gas feed connection.