Inventors:
Robin A. Gardiner - Strasslach, DE
Peter S. Kirlin - Austin TX, US
Thomas H. Baum - New Fairfield CT, US
Douglas Gordon - , US
Connie L. Gordon - Durango CO, US
Timothy E. Glassman - Portland OR, US
Sophia Pombrik - Bethel CT, US
Brian A. Vaarstra - Nampa ID, US
Assignee:
ADVANCED TECHNOLOGY MATERIALS, INC. - Danbury CT
International Classification:
C23C 16/06, C07C 49/92, C07F 7/28, C07F 7/00, C07F 7/24, C07F 5/00, C09D 1/00
US Classification:
4272556, 556 40, 534 15, 106 125
Abstract:
A metalorganic complex composition comprising a metalorganic complex selected from the group consisting of: metalorganic complexes comprising one or more metal central atoms coordinated to one or more monodentate or multidentate organic ligands, and complexed with one or more complexing monodentate or multidentate ligands containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O and F; wherein when the number of metal atoms is one and concurrently the number of complexing monodentate or multidentate ligands is one, then the complexing monodentate or multidentate ligand of the metalorganic complex is selected from the group consisting of beta-ketoiminates, beta-diiminates, C-Calkenyl, C-Ccycloalkenyl and C-Caryl.