COLIN FRANCIS SMITH
Pilots at Harbour Dr, Princeton By The Sea, CA
License number
California A2448304
Issued Date
Jul 2016
Expiration Date
Jul 2018
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
112 Harbour Dr, Princeton By The Sea, CA 94019
Professional information
Mixing Of Materials In An Integrated Circuit Manufacturing Equipment
US Patent:
6758591, Jul 6, 2004
Filed:
Mar 22, 2002
Appl. No.:
10/104710
Inventors:
Peter Krotov - San Jose CA
Colin F. Smith - Half Moon Bay CA
Randy Hall - Santra Cruz CA
Sooyun Joh - Livermore CA
Colin F. Smith - Half Moon Bay CA
Randy Hall - Santra Cruz CA
Sooyun Joh - Livermore CA
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
B01F 1302
US Classification:
366101, 15634533, 261 792, 3661651, 3661652
Abstract:
In one embodiment, a mixing device includes a nozzle that is disposed tangent to a wall of a chamber. Gas flowing from the nozzle rotates in the chamber forming a vortex. Another gas may be flown near a middle portion of the chamber, thereby uniformly mixing the two gases. In another embodiment, an evaporation and mixing device includes a nozzle configured to impart rotation to a gas flowing into a chamber. An injector flows a liquid material near a middle portion of the chamber, thereby mixing the gas and the liquid material. A heater may be employed to help evaporate the liquid material.
Dual Seal Deposition Process Chamber And Process
US Patent:
7737035, Jun 15, 2010
Filed:
Oct 3, 2006
Appl. No.:
11/542723
Inventors:
Gary Lind - Paso Robles CA, US
Colin F. Smith - Half Moon Bay CA, US
William Johanson - Gilroy CA, US
Thomas M. Pratt - San Jose CA, US
John Mazzocco - San Jose CA, US
Colin F. Smith - Half Moon Bay CA, US
William Johanson - Gilroy CA, US
Thomas M. Pratt - San Jose CA, US
John Mazzocco - San Jose CA, US
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
H01L 21/44, C23C 16/00
US Classification:
438680, 29 2501, 118715, 118723 VE
Abstract:
An apparatus and method for sealing and unsealing a chemical deposition apparatus in a chemical deposition process chamber includes a microvolume that has dual sealing elements at its periphery. One seal, the outer seal, is used to seal the inside of the microvolume from the main process chamber. The second (inner) seal is used to seal the inside of the microvolume from a vacuum source. The apparatus and process of the present invention has several advantages for enhanced chamber performance.
Deposition Sub-Chamber With Variable Flow
US Patent:
7993457, Aug 9, 2011
Filed:
Jan 23, 2007
Appl. No.:
11/626328
Inventors:
Peter Krotov - San Jose CA, US
Colin F. Smith - Half Moon Bay CA, US
Colin F. Smith - Half Moon Bay CA, US
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
C23C 16/458, C23F 1/00, H01L 21/306, C23C 16/22, C23C 16/06
US Classification:
118719, 15634531, 15634554
Abstract:
An apparatus and method for depositing film on a substrate includes a plurality of conduits that allow by-product and reactant gases to flow past the edge of a substrate. The apparatus and process of the present invention has several advantages for enhanced chamber performance, particularly for micro-volume chambers using pulsed deposition layer processes.