Inventors:
Christopher V. Trainor - Boxborough MA
Steve T. Cho - Newport Beach CA
Ralph E. Hopkins - Brookline MA
Assignee:
The Charles Stark Draper Laboratory, Inc. - Cambridge MA
International Classification:
G01D 700, G01L 300
Abstract:
A micromechanical contact load force sensor is disclosed. The force sensor comprises an array of capacitive load cells on a substrate. The force sensor is able to sense high loads, on the order on 10. sup. 9 N/m. sup. 2, and distribute the load over a suitable number of the cells of the array while minimizing crosstalk between adjacent cells. The force sensor is useful in biological and robotic applications.