Inventors:
Brian T. Cantrell - Port Deposit MD, US
Kathleen McHugh - Newark DE, US
James T. Murnane - Norristown PA, US
George H. McClain - Middletown DE, US
Durron A. Hutt - Wilmington DE, US
Robert A. Brady - Coatesville PA, US
Christopher A. Young - Newark DE, US
Jeffrey Borcherdt Miller - West Chester PA, US
Assignee:
Rohm and Haas Electronic Materials CMP Holdings, Inc. - Newark DE
International Classification:
B24D 11/00
Abstract:
A method of manufacturing polishing layers having a window for use in chemical mechanical polishing pads is provided, wherein a plurality of polishing layers having an integral window are derived from a cake, wherein the formation of density defects in the cake and the surface roughness of the polishing layers formed are minimized.