Inventors:
Christopher J. Mann - Knoxville TN, US
Philip R. Bingham - Knoxville TN, US
Assignee:
UT-Battelle, LLC - Oak Ridge TN
International Classification:
G01B 9/02, G01B 11/02, G01N 21/41, G01N 21/43
US Classification:
356485, 356498, 356503, 356517
Abstract:
An optical system includes more than two optical interferometers that generate interference phenomena between optical waves to measure a plurality of distances, a plurality of thicknesses, and a plurality of indices of refraction of a sample. An electromagnetic detector receives an output of the optical interferometers to render a magnified image of at least a portion of the sample. A controller reduces or eliminates undesired optical signals through a hierarchical phase unwrapping of the output of the electromagnetic detector.