CHRISTOPHER C KILEY
Engineering in Carlisle, MA
License number
Massachusetts 36451
Issued Date
Mar 10, 1992
Expiration Date
Jun 30, 2018
Type
Mechanical Engineer
Address
Address
Carlisle, MA 01741
Professional information
Semiconductor Manufacturing Process Modules
US Patent:
8267632, Sep 18, 2012
Filed:
Oct 23, 2007
Appl. No.:
11/876876
Inventors:
Peter van der Meulen - Newburyport MA, US
Christopher C Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
Christopher C Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
Assignee:
Brooks Automation, Inc. - Chelmsford MA
International Classification:
H01L 21/677
US Classification:
414217, 414805, 414937
Abstract:
A system for processing semiconductor wafers including a plurality of robotic facilities serially joined to each other to form a substantially linear transport chamber through which wafers can be transferred from each facility, wherein the substantially linear transport chamber is sealed to hold a controlled atmosphere and each of the plurality of robotic facilities includes at least one scara robot having three arm links serially coupled to one another and having a substrate holder rotatably coupled at a distal end of the three arm links, the plurality of robot facilities being configured to effect the transfer of wafers through the substantially linear transport chamber via handoff a wafer between neighboring scara robots, and a multi-entry process module coupled to at least one of the plurality of robotic facilities, where each entry of the multi-entry process module is accessed by the at least one of the at least one scara robot.
Wafer Center Finding With Charge-Coupled Devices
US Patent:
8253948, Aug 28, 2012
Filed:
Feb 27, 2012
Appl. No.:
13/406252
Inventors:
Christopher C. Kiley - Carlisle MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T. Buzan - Dunstable MA, US
Paul E. Fogel - Somerville MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T. Buzan - Dunstable MA, US
Paul E. Fogel - Somerville MA, US
Assignee:
Brooks Automation, Inc. - Chelmsford MA
International Classification:
G01B 11/14
US Classification:
356614, 25055907, 250234, 3562371, 356399
Abstract:
A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.
Wafer Center Finding With A Kalman Filter
US Patent:
8270702, Sep 18, 2012
Filed:
Sep 3, 2010
Appl. No.:
12/875462
Inventors:
Christopher C Kiley - Carlisle MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T Buzan - Dunstable MA, US
Paul E. Fogel - Somerville MA, US
Peter van der Meulen - Newburyport MA, US
Forrest T Buzan - Dunstable MA, US
Paul E. Fogel - Somerville MA, US
Assignee:
Brooks Automation, Inc. - Chelmsford MA
International Classification:
G06K 9/00, G06K 9/40
US Classification:
382141, 382260
Abstract:
A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
Semiconductor Manufacturing Process Modules
US Patent:
2008021, Sep 11, 2008
Filed:
Oct 23, 2007
Appl. No.:
11/876886
Inventors:
Peter van der Meulen - Newburyport MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
International Classification:
H01L 21/677
US Classification:
414217
Abstract:
A variety of process modules are described for use in semiconductor manufacturing processes.
Semiconductor Manufacturing Process Modules
US Patent:
2008012, May 29, 2008
Filed:
Oct 23, 2007
Appl. No.:
11/876902
Inventors:
Peter van der Meulen - Newburyport MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
International Classification:
H01L 21/677
US Classification:
414217
Abstract:
A variety of process modules are described for use in semiconductor manufacturing processes.
Semiconductor Manufacturing Process Modules
US Patent:
2008021, Sep 11, 2008
Filed:
Oct 23, 2007
Appl. No.:
11/876869
Inventors:
Peter van der Meulen - Newburyport MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
International Classification:
H01L 21/677
US Classification:
414217
Abstract:
A variety of process modules are described for use in semiconductor manufacturing processes.
Semiconductor Manufacturing Process Modules
US Patent:
2008012, May 29, 2008
Filed:
Oct 23, 2007
Appl. No.:
11/876854
Inventors:
Peter van der Meulen - Newburyport MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
International Classification:
H01L 21/677
US Classification:
414217
Abstract:
A variety of process modules are described for use in semiconductor manufacturing processes.
Semiconductor Manufacturing Process Modules
US Patent:
2008021, Sep 11, 2008
Filed:
Oct 23, 2007
Appl. No.:
11/876865
Inventors:
Peter van der Meulen - Newburyport MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
International Classification:
H01L 21/677
US Classification:
414217
Abstract:
A variety of process modules are described for use in semiconductor manufacturing processes.
Semiconductor Manufacturing Process Modules
US Patent:
2007028, Dec 13, 2007
Filed:
Mar 5, 2007
Appl. No.:
11/681978
Inventors:
Peter van der Meulen - Newburyport MA, US
Christopher Kiley - Carlisle MA, US
Patrick Pannese - Lynnfield MA, US
Christopher Kiley - Carlisle MA, US
Patrick Pannese - Lynnfield MA, US
International Classification:
H01L 21/677
US Classification:
414217000, 901027000
Abstract:
A variety of process modules are described for use in semiconductor manufacturing processes.
Semiconductor Manufacturing Process Modules
US Patent:
2008021, Sep 11, 2008
Filed:
Oct 23, 2007
Appl. No.:
11/876860
Inventors:
Peter van der Meulen - Newburyport MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
Christopher C. Kiley - Carlisle MA, US
Patrick D. Pannese - Lynnfield MA, US
International Classification:
H01L 21/677
US Classification:
414217
Abstract:
A variety of process modules are described for use in semiconductor manufacturing processes.