Inventors:
David Dausch - Raleigh NC, US
Jim Carlson - Durham NC, US
Christopher Brewer Sanders - Wake Forest NC, US
Scott H. Goodwin - Chapel Hill NC, US
Assignee:
Research Triangle Institute - Research Triangle Park NC
International Classification:
H01L 41/08, A61B 8/00
Abstract:
A method and associated apparatus directed to a piezoelectric micromachined ultrasonic transducer (pMUT) defining an air-backed cavity are provided. A first via defined by a device substrate and associated dielectric layer, and extending to the first electrode, is substantially filled with a first conductive material. A support member engaged with the device substrate defines a second via extending to the first conductive material. The second via has a second conductive material disposed thereon, forms an electrically-conductive engagement with the first conductive material, and extends outwardly of the second via to be accessible externally to the support member. A connective element extends through a third via defined by a connection support substrate and is in electrically-conductive engagement with the second conductive material, wherein one of the connective element and connection support substrate is bonded to one of the support member and second conductive material by a bonding material engaged therebetween.