Inventors:
Vida Ilderem - Puyallup WA
Ali A. Iranmanesh - Federal Way WA
Alan G. Solheim - Puyallup WA
Christopher S. Blair - Puyallup WA
Rick C. Jerome - Puyallup WA
Rajeeva Lahri - Puyallup WA
Madan Biswal - Puyallup WA
Assignee:
National Semiconductor Corporation - Santa Clara CA
International Classification:
H01L 21265
Abstract:
A BiCMOS method and device. The BiCMOS device achieves improved performance through the use of wrap-around silicide contacts, improved MOS gate formation, the use of n- and p-type LDD's, the formation of very shallow base regions in bipolar transistors, and through separate implants for base regions of the bipolar transistors and source/drains of the MOSFETS.