Inventors:
Thomas Henry Pinnington - Pasadena CA, US
James M. Zahler - Pasadena CA, US
Young-Bae Park - Arcadia CA, US
Charles Tsai - Arcadia CA, US
Corinne Ladous - Pasadena CA, US
Sean Olson - Santa Monica CA, US
International Classification:
H01L 21/30, H01L 21/46
US Classification:
438455, 438458, 438459, 257617
Abstract:
An intermediate substrate includes a handle substrate bonded to a thin layer suitable for epitaxial growth of a compound semiconductor layer, such as a III-nitride semiconductor layer. The handle substrate may be a metal or metal alloy substrate, such as a molybdenum or molybdenum alloy substrate, while the thin layer may be a sapphire layer. A method of making the intermediate substrate includes forming a weak interface in the source substrate, bonding the source substrate to the handle substrate, and exfoliating the thin layer from the source substrate such that the thin layer remains bonded to the handle substrate.