Inventors:
Charles R. Cook - North Palm Beach FL
Assignee:
International Telephone & Telegraph Corporation - Nutley NJ
International Classification:
B23P 1700
Abstract:
This relates to the scribing and breaking of a semiconductor wafer into individual dies by anodizing the silicon in regions corresponding to the die boundaries. The regions are selectively anodized, and the anodization is continued until the anodized silicon extends into the semiconductor wafer to a depth that allows easy breakage when the wafer is stressed. To facilitate breakage, the anodized silicon may be removed with hydrofluoric acid.