Inventors:
Jeffrey X. Cao - Wayland MA
Robert M. Giancola - E. Hampstead NH
Charles G. Caprini - Wakefield MA
David Garcia - Leominster MA
Assignee:
ASE Americas, Inc. - Billerica MA
International Classification:
B01D 900
Abstract:
A new EFG (Edge-defined Film-fed Growth) crucible/die configuration is provided which (a) overcomes the tendency for silicon feed material to form a solid mass near the center hub region in the hot-zone during the crystal growth and (b) prevent the crucible/die unit from fracturing its supporting susceptor during cool-down.