Inventors:
Eric Peter Goodwin - Tucson AZ, US
David Michael Williamson - Tucson AZ, US
Daniel Gene Smith - Tucson AZ, US
Michel Pharand - Los Gatos CA, US
Alenxander Cooper - Belmont CA, US
Alec Robertson - Palo Alto CA, US
Brian L. Stamper - Tucson AZ, US
Assignee:
Nikon Corporation - Tokyo
International Classification:
G01B 11/24, G01B 11/14, G02B 26/10, G02B 17/08, G02B 27/10
US Classification:
356601, 359726, 359618, 359364, 3592121, 3592051, 3592079, 356614
Abstract:
An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.