BRADFORD ALLEN COZAD
Pilots at Bayonne Dr, Newark, CA

5865417, Feb 2, 1999

Sep 27, 1996

8/720099

James M. Harris - Saratoga CA
John S. Fitch - Newark CA
Bradford A. Cozad - Newark CA
Dean Allyn Hopkins - San Jose CA

Redwood Microsystems, Inc. - Menlo Park CA

F16K 2700

251 11

A genus of integrated valves having an integrated actuator with a thin, flexible membrane formed of silicon driven by pressure of a fluid trapped in a cavity formed by bonding a first and second die. The cavity has a resistor formed therein through which current is driven to cause the pressure to rise and the flexible membrane to flex. Movement of membrane is used to drive a valve element to a position where it unblocks a port to open the valve. This genus includes species such as ultra clean embodiments where a containment barrier keeps ultra clean processing gases confined to a wetted area having materials and bonding agents selected so as to be chemically compatible with the materials and conditions in the wetted area. Low leak species include a compliant material for a valve seat which is deformed by a ridge surrounding a port in the closed position. It is this port which is blocked and unblocked by movement of the valve element to close and open the valve.

6149123, Nov 21, 2000

Sep 25, 1997

8/937611

James M. Harris - Saratoga CA
Bradford A. Cozad - Newark CA
Dean Allyn Hopkins - San Jose CA
John S. Fitch - Newark CA

Redwood Microsystems, Inc. - Menlo Park CA

F16K 3102

251 11

Integrated, electrically operable micro-valves are formed to control fluid flow and pressure. These valves convert electrical energy to mechanical energy through an energy conversion device having a sealed cavity with a flexible wall. The sealed cavity contains a fluid that expands and contracts as it is heated or cooled, thus causing the flexible wall to move. Movement of this wall or membrane is used to move a valve element and dynamically control the opening or closing of a valve port over a predetermined range.

6160243, Dec 12, 2000

Sep 25, 1998

9/161185

Bradford Allen Cozad - Newark CA

Redwood Microsystems, Inc. - Menlo Park CA

F27D 1100, F16K 3100

219439

A micromachined fluid control apparatus includes a micromachined boiler with a thermally conductive housing that has a housing exterior surface and a housing interior surface. The housing interior surface defines an interior void that has a fluid positioned within it. A heat source is incorporated with the housing exterior surface. The heat source selectively generates heat that is conducted through the thermally conductive housing so as to selectively expand the fluid in a predetermined manner. A load resistor may be positioned within the thermally conductive housing. Current may be driven through the load resistor in a predetermined manner to further control the selective expansion of the fluid.

7309056, Dec 18, 2007

Mar 26, 2004

10/810242

James M. Harris - Menlo Park CA, US
Michael Selser - Livermoe CA, US
Bradford A. Cozad - Newark CA, US
Albert K. Henning - Palo Alto CA, US

SMC Kabushiki Kaisha - Tokyo

F16K 31/02

251 11, 25112906

Integrated micro-valve is formed to control fluid flow and pressure. The valve converts supplied energy to mechanical energy through a means for energy conversion resident above a flexible wall or membrane. In one embodiment a sealed cavity contains a fluid that expands and contracts as it is heated or cooled, thus causing the flexible wall to move. Movement of this wall or membrane is used to move a valve element and dynamically control the opening or closing of a valve port over a predetermined range. Additional means for stiffening are added to the membrane to improve performance.

6986365, Jan 17, 2006

Sep 30, 2003

10/676469

Albert K. Henning - Palo Alto CA, US
Michael Selser - Livermore CA, US
Bradford A. Cozad - Newark CA, US

Redwood Microsystems - Menlo Park CA

F16K 1/42

13762528, 1376253

A method for achieving high flow in valves with small actuation distance is described. A detailed description for a silicon microvalve is provided. An algorithm is described for designing optimized valves.