Inventors:
Jacob Smith - Santa Clara CA, US
ALEXANDER TAM - Union City CA, US
R. SURYANARAYANAN IYER - Edina MN, US
SEAN SEUTTER - San Jose CA, US
BINH TRAN - Houston TX, US
NIR MERRY - Mountain View CA, US
ADAM BRAILOVE - San Jose CA, US
ROBERT SHYDO, JR. - Pelham NH, US
ROBERT ANDREWS - Kensington NH, US
FRANK ROBERTS - North Reading MA, US
THEODORE SMICK - Essex MA, US
GEOFFREY RYDING - Manchester MA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
C23C 14/50
Abstract:
A method and apparatus for processing a substrate utilizing a rotating substrate support are disclosed herein. In one embodiment, an apparatus for processing a substrate includes a chamber having a substrate support assembly disposed within the chamber. The substrate support assembly includes a substrate support having a support surface and a heater disposed beneath the support surface. A shaft is coupled to the substrate support and a motor is coupled to the shaft through a rotor to provide rotary movement to the substrate support. A seal block is disposed around the rotor and forms a seal therewith. The seal block has at least one seal and at least one channel disposed along the interface between the seal block and the shaft. A port is coupled to each channel for connecting to a pump. A lift mechanism is coupled to the shaft for raising and lowering the substrate support.