MR. BHARATKUMAR K PATEL
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Low Dielectric Photoimageable Compositions And Electronic Devices Made Therefrom
Low Dielectric Photoimageable Compositions And Electronic Devices Made Therefrom
US Patent:
2013020, Aug 15, 2013
Filed:
Feb 9, 2012
Appl. No.:
13/369809
Inventors:
Ruzhi ZHANG - Pennington NJ, US
Jihoon KIM - Huntingdon Valley PA, US
Bharatkumar K. PATEL - Edison NJ, US
Elizabeth WOLFER - Bethlehem PA, US
Jihoon KIM - Huntingdon Valley PA, US
Bharatkumar K. PATEL - Edison NJ, US
Elizabeth WOLFER - Bethlehem PA, US
Assignee:
AZ ELECTRONIC MATERIALS USA CORP. - SOMERVILLE NJ
International Classification:
G03F 7/20, B32B 3/10, G03F 7/004
US Classification:
4281951, 4302851, 4302871, 430325
Abstract:
This invention relates generally to silicon based photoresist compositions that can be used in forming low k dielectric constant materials suitable for use in electronic devices, methods of their use and the electronic devices made therefrom.