Inventors:
Harold R. Klievoneit - Phoenix AZ
Arthur A. Smith - Tucson AZ
Assignee:
St. Florian Company, Ltd. - Phoenix AZ
International Classification:
B24B 704
Abstract:
A rotatable grinding wheel bears against a rotatable wafer disk support wheel to grind the wafer disks to a predetermined thickness. The grinding wheel is translatable laterally to its axis of rotation, which translation repositions the grinding wheel with respect to the support wheel in a fixed proportion to the lateral distance traveled and permits high tolerance grinding with relative coarse lateral positional adjustment of the grinding wheel.