DR. ARNE JONATHAN BENSON, D.C.
Chiropractic at Lynn Cir, Prior Lake, MN
License number
Minnesota 2228
Category
Chiropractic
Type
Chiropractor
License number
Minnesota 2086-012
Category
Chiropractic
Type
Chiropractor
Address
Address
13677 Lynn Cir, Prior Lake, MN 55378
Phone
(952) 890-2822
Professional information
Dr. Arne J Benson, Savage MN - DC (Doctor of Chiropractic)
Specialties:
Chiropractic
Address:
13677 Lynn Cir, Savage 55378
(952) 890-2822 (Phone)
(952) 890-2822 (Phone)
Languages:
English
High Flow High Control Valve And Assembly
US Patent:
2003011, Jun 26, 2003
Filed:
Dec 26, 2001
Appl. No.:
10/034318
Inventors:
Michael Volovets - Eden Prairies MN, US
Arne Benson - Shakopee MN, US
Arne Benson - Shakopee MN, US
Assignee:
FSI International, Inc.
International Classification:
E03B001/00
US Classification:
137/625300
Abstract:
A valve and a valve assembly are provided that exhibit both highly controlled metering of fluid, as well as a high volume of fluid flow when the valve is in the fully open position. The regulating portion of the valve is provided with channels having different cross-sectional shapes, or channels having different lengths to provide staged flow. The valve is further provided with a fluid boundary element that is movably operably connected to the valve for mounting the valve to the valve body.
System For Supplying Water Vapor In Semiconductor Wafer Treatment
US Patent:
2010012, May 20, 2010
Filed:
Sep 8, 2009
Appl. No.:
12/555502
Inventors:
Arne Benson - Shakopee MN, US
Assignee:
FSI INTERNATIONAL, INC. - Chaska MN
International Classification:
F22B 27/00, F22B 37/26, F22B 1/28
US Classification:
392399, 122 40, 122491, 392400, 392405
Abstract:
A system for supplying water vapor in a process for treatment of a semiconductor wafer, comprising a treatment chamber having an interior for receiving at least one semiconductor wafer and a water vapor dispenser. The water vapor dispenser comprises
Rotary Unions, Fluid Delivery Systems, And Related Methods
US Patent:
7422031, Sep 9, 2008
Filed:
Mar 12, 2004
Appl. No.:
10/799250
Inventors:
Arne C. Benson - Shakopee MN, US
Edward D. Hanzlik - Shorewood MN, US
Edward D. Hanzlik - Shorewood MN, US
Assignee:
FSI International, Inc. - Chaska MN
International Classification:
F16L 27/08
US Classification:
137580, 285 14, 285275
Abstract:
A rotary union having a housing, a rotor, and a post such that a fluid can be conveyed through the rotary union. The rotor is rotatably coupled to the housing, preferably by at least one bearing interposed between a portion of the rotor exterior and a portion of the housing interior. The post is positioned in the rotary union in a manner effective to help fluidly couple the rotor to the housing and such that an annular gap surrounds at least a portion of the post such that the annular gap constitutes at least a portion of a drain fluid pathway. The present invention also includes fluid delivery systems including such rotary unions and methods of making and/or using such rotary unions.
System And Method For Carrying Out Liquid And Subsequent Drying Treatments On One Or More Wafers
US Patent:
7556697, Jul 7, 2009
Filed:
Jun 14, 2004
Appl. No.:
10/866916
Inventors:
Arne C. Benson - Shakopee MN, US
Erik D. Olson - Shakopee MN, US
Douglas S. Spaeth - Chaska MN, US
Erik D. Olson - Shakopee MN, US
Douglas S. Spaeth - Chaska MN, US
Assignee:
FSI International, Inc. - Chaska MN
International Classification:
B08B 7/00, B08B 5/04, C25F 3/30
US Classification:
134 21, 134 1, 134 13, 134 26, 134 32, 134902
Abstract:
Systems for processing microelectronic substrates in a process chamber that incorporate improved technology for transitioning from a wet process to a dry process (especially transitioning from rinsing to drying). At least a portion of residual liquid remaining in fluid supply lines after a wet treatment is removed via a pathway that avoids purging directly onto the substrates. Related methods are also included in the present invention.