MR. ANTHONY JAYCEE DE MESA, REGISTERED NURSE
Nursing at Franklin Blvd, Lemoore, CA

5748656, May 5, 1998

Jan 5, 1996

8/583302

Tom A. Watson - Carlsbad CA
William N. Partlo - San Diego CA
Donald G. Larson - San Diego CA
Igor V. Fomenkov - San Diego CA
Anthony J. de Ruyter - San Diego CA
Palash P. Das - Vista CA

Cymer, Inc. - San Diego CA

H01S 3045

372 35

Disclosed is a laser useful in, e. g. , photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

6021150, Feb 1, 2000

Mar 12, 1998

9/041832

William N. Partio - San Diego CA
Donald G. Larson - San Diego CA
Igor V. Fomenkov - San Diego CA
Anthony J. de Ruyter - San Diego CA
Palash P. Das - Vista CA

Cymer, Inc. - San Diego CA

H01S 322

372 57

Disclosed is a laser useful in, e. g. , photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

5596590, Jan 21, 1997

Jan 25, 1996

8/591754

Anthony J. de Ruyter - San Diego CA
David W. Means - Carlsbad CA

Cymer Laser Technologies - San Diego CA

H01S 3121

372 14

A shutter mechanism having a slide element coupled to a support base by a plurality of roller bearings journaled between opposing pairs of guide rods is disclosed. The slide element and support base have corresponding beam apertures in alignment when the shutter is in its open position. Angularly mounted on the slide, adjacent to the slide's beam aperture, is a UV reflective mirror. When the shutter is commended to close, an actuator forces the slide and support base apertures out of alignment, while simultaneously positioning the UV reflective mirror into the position previously occupied by the slide's aperture. A laser beam, previously being transmitted through the aligned apertures, will be reflected by the mirror to a beam stop as a diagnostic instrument mounted on the support base.