Inventors:
Buz Darabnia - Gilbert AZ, US
Andy Yednak - Phoenix AZ, US
Mike Halpin - Scottsdale AZ, US
Loren Jacobs - Chandler AZ, US
Ravinder Aggarwal - Gilbert AZ, US
Assignee:
ASM America, Inc. - Phoenix AZ
International Classification:
G05D 23/00, G01K 7/02
US Classification:
374179, 374208, 374E07004
Abstract:
A thermocouple for use in a semiconductor processing reaction is described. The thermocouple includes a sheath having a measuring tip and an opening at the opposing end. A support member that receives a portion of a first wire and a second wire is received within the sheath. The first and second wires form a junction that contacts the inner surface of the sheath at the measuring tip. A spacing member is secured at the opening of the sheath and receives the support member. The spacing member allows the support member, first wire, and second wire to freely thermally expand relative to each other without introducing compression or tension stresses therein.