Inventors:
Andres Roberto Ramirez - San Antonio TX
Roger DeLuna - San Antonio TX
Frank John Kanozik - Helotes TX
Assignee:
Sony Corporation - Tokyo
Sony Electronics, Inc. - Park Ridge NJ
International Classification:
C23C 1600, B65G 4907
Abstract:
A chuck centering tool for aligning a wafer chuck in an edge bead rinsing device is made from disk which is substantially the same size as a semiconductor wafer. A circular recess centered on the center of the disk is made in the underside of the tool. The recess is sized to receive the end of the wafer chuck. With the tool in the place of a wafer on a wafer transport system, the chuck can be aligned to enter the recess. Thereafter, the chuck is properly aligned with respect to wafers on the transport system.