ANDREI VELDMAN
Pilots at Texas Oak Ter, Sunnyvale, CA
License number
California A4305795
Issued Date
Mar 2016
Expiration Date
Mar 2018
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
487 Texas Oak Ter, Sunnyvale, CA 94086
Professional information
Optical Metrology Tool Equipped With Modulated Illumination Sources
US Patent:
2013016, Jul 4, 2013
Filed:
Oct 10, 2012
Appl. No.:
13/648768
Inventors:
Lawrence D. Rotter - Pleasanton CA, US
David Y. Wang - Santa Clara CA, US
Andrei Veldman - Sunnyvale CA, US
Kevin Peterlinz - Fremont CA, US
Gregory Brady - San Jose CA, US
Derrick Shaughnessy - San Jose CA, US
David Y. Wang - Santa Clara CA, US
Andrei Veldman - Sunnyvale CA, US
Kevin Peterlinz - Fremont CA, US
Gregory Brady - San Jose CA, US
Derrick Shaughnessy - San Jose CA, US
Assignee:
KLA-TENCOR CORPORATION - Milpitas CA
International Classification:
G01N 21/55, G01N 21/47
US Classification:
356369, 356445
Abstract:
The present invention may include a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulses trains for use in multi-wavelength time-sequential optical metrology.