Inventors:
Andre Anders - El Cerrito CA, US
Joakim Andersson - Berkeley CA, US
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
C23C 14/00, C23C 14/32, C23C 4/00, C25B 9/00, C25B 11/00, C25B 13/00, B05D 1/08, B05D 3/14, H05H 1/26
US Classification:
20419212, 20419238, 20429801, 20429841, 427446, 427562, 427564
Abstract:
A method and apparatus are described for very low pressure high powered magnetron sputtering of a coating onto a substrate. By the method of this invention, both substrate and coating target material are placed into an evacuable chamber, and the chamber pumped to vacuum. Thereafter a series of high impulse voltage pulses are applied to the target. Nearly simultaneously with each pulse, in one embodiment, a small cathodic arc source of the same material as the target is pulsed, triggering a plasma plume proximate to the surface of the target to thereby initiate the magnetron sputtering process. In another embodiment the plasma plume is generated using a pulsed laser aimed to strike an ablation target material positioned near the magnetron target surface.