ALI JOSEPH RASTEGAR
Pilots at High St, Palo Alto, CA
License number
California A4671846
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
2159 High St, Palo Alto, CA 94301
Organization information
See more information about ALI JOSEPH RASTEGAR at bizstanding.comAli Joseph Rastegar
2159 High St, Palo Alto, CA 94301
Status:
Inactive
Industry:
Business Services at Non-Commercial Site, Nonclassifiable Establishments
Professional information
Methods And Structures Of Integrated Mems-Cmos Devices
US Patent:
2013023, Sep 12, 2013
Filed:
Mar 7, 2013
Appl. No.:
13/788503
Inventors:
Ali J. Rastegar - Palo Alto CA, US
Mugurel Stancu - San Jose CA, US
Xiao Charles Yang - Cupertino CA, US
Mugurel Stancu - San Jose CA, US
Xiao Charles Yang - Cupertino CA, US
Assignee:
MCube, Inc. - San Jose CA
International Classification:
H01L 29/66
US Classification:
438 3, 438 50, 438 49
Abstract:
A method for fabricating an integrated MEMS-CMOS device uses a micro-fabrication process that realizes moving mechanical structures (MEMS) on top of a conventional CMOS structure by bonding a mechanical structural wafer on top of the CMOS and etching the mechanical layer using plasma etching processes, such as Deep Reactive Ion Etching (DRIE). During etching of the mechanical layer, CMOS devices that are directly connected to the mechanical layer are exposed to plasma. This sometimes causes permanent damage to CMOS circuits and is termed Plasma Induced Damage (PID). Embodiments of the present invention presents methods and structures to prevent or reduce this PID and protect the underlying CMOS circuits by grounding and providing an alternate path for the CMOS circuits until the MEMS layer is completely etched.