Inventors:
Michael Francis Carolan - Allentown PA
Paul Nigel Dyer - Allentown PA
Stephen Mark Fine - Emmaus PA
Alexander Makitka - Stroudsburg PA
Robin Edward Richards - Chalfont PA
Leslie Errol Schaffer - Macungie PA
Assignee:
Air Products and Chemicals, Inc. - Allentown PA
International Classification:
B32B 326, B32B 514, B32B 518
Abstract:
The present invention is a method for manufacturing inorganic membranes which are capable of separating oxygen from oxygen-containing gaseous mixtures. The membranes comprise a porous composite of a thin layer of a multicomponent metallic oxide which has been deposited onto a porous support wherein the pores of the multicomponent metallic oxide layer are subsequently filled or plugged with a metallic-based species. The inorganic membranes are formed by depositing a porous multicomponent metallic oxide layer onto the porous support to form a porous composite having a network of pores capable of transporting gases. The network of pores are plugged or filled by organometallic vapor infiltration to form an inorganic membrane having essentially no through porosity.