ALEXANDER LIU, MD
Osteopathic Medicine at Great Oaks Blvd, San Jose, CA

5738756, Apr 14, 1998

Jun 30, 1995

8/497461

Alexander F. Liu - San Jose CA

Lam Research Corporation - Freemont CA

H01L 2100, G01B 900

1566271

An improved method for specifying and reliably detecting endpoints in processes such as plasma etching, where the signal-to-noise ratio has been severely degraded due to factors such as "cloudy window" and low ratio of reactive surface area to non-reactive surface area. The improved method of the invention samples signals produced by photo sensitive equipment, digitally filters and cross-correlates the data, normalizes the data using an average normalization value, and provides further noise reduction through the use of three modes of endpoint specification and detection. The three modes of endpoint specification and detection require a pre-specified number of consecutive samples to exhibit a certain behavior before the endpoint is deemed detected and the process terminated as a result. The three modes of endpoint specification and detection also permit a very fine control of the etch time by permitting the user to adjust the specified endpoint by gradations of the sampling period. The improved method of the invention is capable of being implemented on known apparatus.

6190927, Feb 20, 2001

Oct 27, 1997

8/958611

Alexander F. Liu - San Jose CA

Lam Research Corporation - Fremont CA

H01L 2100, G01B 900

438 8

An improved method for specifying and reliably detecting endpoints in processes such as plasma etching, where the signal-to-noise ratio has been severely degraded due to factors such as "cloudy window" and low ratio of reactive surface area to non-reactive surface area. The improved method of the invention samples signals produced by photo sensitive equipment, digitally filters and cross-correlates the data, normalizes the data using an average normalization value, and provides further noise reduction through the use of three modes of endpoint specification and detection. The three modes of endpoint specification and detection require a pre-specified number of consecutive samples to exhibit a certain behavior before the endpoint is deemed detected and the process terminated as a result. The three modes of endpoint specification and detection also permit a very fine control of the etch time by permitting the user to adjust the specified endpoint by gradations of the sampling period. The improved method of the invention is capable of being implemented on known apparatus.

3938091, Feb 10, 1976

Jul 19, 1974

5/490179

Martin M. Atalla - Portola Valley CA
Alexander F. Liu - San Jose CA

Atalla Technovations Company - Sunnyvale CA

G06K 900

340149A

A customer code word issuing machine is provided wherein a customer manually inputs to the machine his secret password. The machine encodes the password and displays his corresponding issued code word. A verification machine is provided which includes a dial or keyboard for manually inputting the customer's password and the issued code word. The verification machine encodes the inputted password to derive an output for comparison with the manually inputted code word to derive an output indicative of the truth or falseness of the match of the code word with the respective password. The verification machine may be employed to open a lock, to allow use of a credit card for a telephone call, purchase of goods, etc.