Inventors:
James H. Adair - State College PA, US
Mary Frecker - State College PA, US
Christopher Muhlstein - University Park PA, US
Eric Mockensturm - State College PA, US
Harriet Black Nembhard - University Park PA, US
Randy S. Haluck - Lititz PA, US
Abraham Mathew - Hershey PA, US
Nicholas Antolino - University Park PA, US
Gregory R Hayes - State College PA, US
Milton Aguirre - State College PA, US
Rebecca Kirkpatrick - University Park PA, US
Assignee:
The Penn State Research Foundation - University Park PA
International Classification:
B32B 1/00, B32B 3/00
Abstract:
A polycrystalline mesoscale component, formed through a process including filing a mold cavity formed in a photoresist with a mold fill, is provided with an overall length L divided into multiple segments with a second segment extending from a first segment at a nonlinear angle. The first segment has a first segment height H1 and a first segment thickness T1, while the second segment has a second segment height H2 and a second segment thickness T2, with the lesser of H1 and H2 defining a minimum segment height Hmin and the lesser of T1 and T2 defining a minimum segment thickness Tmin. The resultant component has a ratio of L:Hmin:Tmin of 20-80:1:0. 5-10 where Hmin is between 5 and 500 microns. In specific instances, the nonlinear angle is acute, the multiple segments are rectilinear in cross section, and a segment thickness has an edge resolution of between 0. 1 and 2 microns.